Integrated three-axial accelerometer
Abstract
Integrated three-axial accelerometer
Incoming article date: 17.12.2018In article the design of an integrated micromechanical accelerometer of capacitive type is considered. The method with use of operation of self-assembly, constructed on the basis of the operated self-organization of mechanically intense semiconductor layers of GaAs/InAs is considered. This design was designed also a promodelirovana in ANSYS CAD. Results of model operation meet requirements, shown to present microaccelerometers, and give the chance to use them for further perfecting of structures of the given type. It is possible to use the obtained data in particular for calculation of the recommended parameters when developing techniques of projection of accelerometers and gyroscopes and also for development of more precise models of microelectromechanical structures.
Keywords: MEMS, capacitive type, micromechanical accelerometer, design, sensor, sensor, mathematical model, GaAs/InAs