Passive pressure sensor based on surface acoustic waves
Abstract
Passive pressure sensor based on surface acoustic waves
Proposed to use a sensor based on surface acoustic wave (SAW), which represents a delay line with unidirectional interdigital transducers (IDT) for measuring the pressure in the liquid. Reflective IDT loaded by series connected inductor and two capacities. One of these capacities - this trimmer, and another - a membrane capacitor whose capacitance depends on the pressure. When the pressure changes of the membrane capacitance capacitor, which changes the reflectivity of the reflective IDT. The magnitude of changes in this ratio determines the pressure applied to the membrane capacity.
Keywords: Sensor, pressure, surface acoustic wave, pulse answer, liquid